化学级石英坩埚
化学级石英坩埚
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电弧石英坩埚

ARC Quartz Crucibles

用电弧法生产的乳白石英坩埚是拉制大直径单晶硅,发展大规模集成电路必不可少的基础材料。它具有高纯度、耐温性强、尺寸大精度高、保温性好、节约能源、质量稳定等优点。我公司还可以生产各种尺寸的透明和半透明材质的石英坩埚。这些产品可以根据应用范围按标准规格生产,也可以按您要求定做非标准规格的坩埚。

Opaque quartz crucible of arc melting usedfor semiconductor industry is the essential basic material for pullingmonocrystalline silicon and developing L S I circuit. It has the advantages ofhigh purity, high temperature resistance with big size, good thermalinsulation, economization on energy, quality stability etc. We also can producevarious specifications of transparent and translucent crucibles. Cruciblescan be produced according to the standard or produced on customer’s required specification and shape.

化学成分分析

Chemical element composition

型号/Type

Al

Fe

Ca

Cu

K

Na

Li

B

OH

EAST-A

20

1

1.5

0.1

3

3

3

0.3

30

EAST-B

15

0.3

0.6

0.05

0.7

1.0

0.7

<0.1

30

坩埚规格尺寸

Crucible Dimensions

坩埚尺寸

Dimensions

外径

OD

高度

Height

厚度(WT)

R

r

T1

T2

T3

8"

203±

0

3


153±3

5.5±1.5

3

8.5

305

30

10"

254±2

178±3

6.0±1.5

3.5

9

305

70

12"

305±2

228±3

6.5±1.5

4

9.5

305

80

14"

355±2

254±3

7.5±1.5

5

10.5

400

90

16"

404±2

305±3

8.5±1.5

6

11.5

400

90

18"

457±2

355±3

8.5±1.5

6

11.5

500

120

20"

508±4

381±3

10±3

6

11.0

500

120

22"

558±4.5

381±3

10±3

7

11.0

558

89

24"

610±4.5

381±3

12±3

12±3

12±3

610

130